Principle of plasma etching equipment under the vacuum state, the use of radio-frequency radiation makes oxygen, nitrogen, argon, carbon tetrafluoride gas generate a highly reactive ions and so on with the device to form a volatile compound, and then the vacuum system The volatiles were cleared out plasma etching equipment used in etching silicon wafer edge phosphor layer, the diffusion process, not only on the surface of the wafer diffusion of phosphorus, silicon diffusion also on the edge of phosphorus, which causes the silicon positive and negative poles sheet through the edge of the conduction short circuit. So must the wafer edge this layer is diffused on a silicon phosphorus removed, probably removed 1-3 microns. Wafer etching machine horizontal rotary, the reaction gas is introduced into the carbon tetrafluoride, oxygen and nitrogen, the principle is the silicon compound gas of carbon tetrafluoride, oxygen and silicon edge occurs in the discharged state reaction After the silicon powder and gaseous substances react to form, together with the air being pumped, etc. Dongguan Kai-day automation equipment Ltd. is a company specializing in automation equipment R & D, manufacturing and sales company, is well-known semiconductor and solar cell industries Process equipment suppliers, we produce plasma cleaning machines, widely used in LED, LCD, LCM, mobile phones day money, laptops and shell buttons, CMOS camera and digital camera components, Si, InP, GaAs wafers, wafer, fiber, circuit board, X-ray lens, UV / IR lenses, optical head components, optical components, precision molds, precision instruments and packaging, printing, textiles, plastics, biological materials, medical utensils, semiconductors, solar photovoltaic and other industries ...... equipment quality comparable to similar foreign products, our innovative and reliable solutions to increase productivity and reduce labor intensity, saving labor costs as the guiding direction, relying on its own high-quality management, research and development, production capacity and fast response speed, providing customers with high quality products and good service. We use machine parts from the United States, Japan, Germany or the famous Seiko enterprises, the introduction of each machine are its stability and durability, high cost is known, we allow customers to believe that: Kai-day science and technology is the most trusted Brand! Currently mature products: plasma cleaning, plasma etching machine, wafer loading machine, also known as inserts, double sheet inserted machine, sintering furnace pass backend machine, rewinding machine silicon, quartz boat loader , wafer automatic loading and unloading machines, our products have been authorized dozens of national patents. At the same time the company also supporting homegrown solar photovoltaic industry supplies, such as various wafer carrier, silicone sucker, anti-corrosion oils, etc. Company aims: the least fault is the lowest cost, minimum maintenance is the best sale.